A novel spiral inductor model with a new parameter-extraction approach

A novel inductor model, which considers the magnetic and capacitive substrate coupling comprehensively, and a new fast approach for substrate network parameter extraction are presented in this paper. The introduction of substrate parasitic inductance (SPI) and the mutual inductance is based on the resonance characteristic of the measured substrate´s Y-parameter and their physical meaning. A series of inductors were fabricated to build and verify the inductor model, using 0.13 μm RF CMOS process. A good agreement between the measured data and model over a wide frequency range has been obtained.