A micromachine-based assembly of tungsten multichannel electrodes for neural recording

In this paper a simple and low-cost technique for manufacturing tungsten multichannel microelectrode arrays is presented. This technique pre-produces a reusable micromold for aligning tungsten probes and forming SU-8 holder by micromachining, which allows to easily achieve array probes with uniform geometries and controlled small spacing. Electrical insulation of the probe shank is achieved by a conformal coating of a thin polyimide (PI) film. Recording site with precise opening cut is defined by selectively removing PI film from the probe tip by front-back double side photolithography. Finally, the electrical properties of finished array probes are also discussed.