A semi-analytical model for the subthreshold behavior of SOI FinFLASH structures

In this paper we present an original semi-analytical model for the subthreshold electrical behavior of complex 3D structures as the SOI FinFLASH devices. This physically-based model, which does not need any fitting parameter, solves the Poisson equation for a fin covered by trapped charges in the active dielectrics. The analytical results are compared with fully 3D numerical simulations and a good agreement is obtained down to fins with very small feature sizes (order of tens of nm). This model can be efficiently used to gain information on important cell electrical behaviors as the threshold voltage shift DeltaV_th and the subthreshold slope factor S