Title :
Design and fabrication of a novel tri-axis micro-gyroscope
Author :
Tsai, Nan-Chyuan ; Sue, Chung-Yang ; Lin, Chih-Che
Author_Institution :
Dept. of Mech. Eng., Nat. Cheng Kung Univ., Tainan
Abstract :
This paper presents an innovative micro-gyroscope which possesses the capability of detecting tri-axis angular motions. The coupling effect of the tri-axis angular rates due to Coriolis acceleration and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. In order to ensure further repeatability and reliability, the suspension flexures and stiffness are examined by Finite Element Method (FEM) and compared with simplified mathematical analysis by conventional beam deformation theories. Finally, the sensitivity and nonlinearity of tri-axis gyroscopes are theoretically investigated and evaluated.
Keywords :
Coriolis force; finite element analysis; gyroscopes; micromechanical devices; Coriolis acceleration; beam deformation theory; coupling effect; finite element method; tri-axis angular motion detection; tri-axis microgyroscope; Acceleration; Electrodes; Fabrication; Finite element methods; Gyroscopes; Mathematical analysis; Mechanical engineering; Micromechanical devices; Semiconductor device measurement; Springs; Coriolis response; FEM; MEMS; micro-gyroscope;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484371
