DocumentCode :
3234163
Title :
Photonic metamaterials new opportunities for nanoimprint
Author :
Feth, Nils ; Decker, Manuel ; Dolling, Gunnar ; Klein, Matthias W. ; Linden, Stefan ; Wegener, Martin
Author_Institution :
Inst. fur Nanotechnol., Karlsruhe
fYear :
2007
fDate :
23-25 July 2007
Firstpage :
76
Lastpage :
77
Abstract :
This article presents a short discussion on the fabrication of photonic metamaterials. The method of choice for fabricating metamaterials is still electron beam lithography despite its intrinsic drawbacks like long writing time and high operation costs. Thus only small areas can be structured within reasonable time and at reasonable costs. Another way to fabricate high-quality photonic metamaterials on a macroscopic scale is provided by interference lithography which allows structuring huge areas. Another promising technique to achieve large-scale, high-quality metamaterials is nanoimprint lithography, which was recently applied to fabricate photonic metamaterials.
Keywords :
electron beam lithography; metamaterials; nanolithography; optical fabrication; optical materials; refractive index; soft lithography; electron beam lithography; interference lithography; nanoimprint lithography; photonic metamaterials; writing time; Interference; Lithography; Magnetic materials; Metamaterials; Optical materials; Optical refraction; Optical resonators; Optical variables control; Optimized production technology; Permeability;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
Conference_Location :
Portland, OR
ISSN :
1099-4742
Print_ISBN :
1-4244-0926-8
Electronic_ISBN :
1099-4742
Type :
conf
DOI :
10.1109/LEOSST.2007.4288339
Filename :
4288339
Link To Document :
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