• DocumentCode
    3234217
  • Title

    UV-based Nano Imprint Fabrication of Gold Grating Couplers on Silicon-on-Insulator

  • Author

    Scheerlinck, Stijn ; Van Thourhout, Dries ; Baets, Roel

  • Author_Institution
    Ghent Univ., Ghent
  • fYear
    2007
  • fDate
    23-25 July 2007
  • Firstpage
    82
  • Lastpage
    83
  • Abstract
    Fiber-to-waveguide gold grating couplers are fabricated using UV-based nano imprint lithography and lift-off on top of an unprocessed silicon-on-insulator chip. Over 22% efficiency and a 1 dB bandwidth of 36 nm is demonstrated in the telecom band.
  • Keywords
    diffraction gratings; gold; integrated optics; nanolithography; optical fabrication; optical fibre couplers; optical waveguides; silicon; ultraviolet lithography; Si-SiO2; UV-based nano imprint fabrication; UV-based nano imprint lithography; fiber-to-waveguide gold grating couplers; silicon-on-insulator chip; Fabrication; Fiber gratings; Filling; Gold; Lithography; Optical coupling; Optical fiber couplers; Optical waveguides; Refractive index; Silicon on insulator technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
  • Conference_Location
    Portland, OR
  • ISSN
    1099-4742
  • Print_ISBN
    1-4244-0926-8
  • Electronic_ISBN
    1099-4742
  • Type

    conf

  • DOI
    10.1109/LEOSST.2007.4288342
  • Filename
    4288342
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3234217