Title :
UV-based Nano Imprint Fabrication of Gold Grating Couplers on Silicon-on-Insulator
Author :
Scheerlinck, Stijn ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Ghent Univ., Ghent
Abstract :
Fiber-to-waveguide gold grating couplers are fabricated using UV-based nano imprint lithography and lift-off on top of an unprocessed silicon-on-insulator chip. Over 22% efficiency and a 1 dB bandwidth of 36 nm is demonstrated in the telecom band.
Keywords :
diffraction gratings; gold; integrated optics; nanolithography; optical fabrication; optical fibre couplers; optical waveguides; silicon; ultraviolet lithography; Si-SiO2; UV-based nano imprint fabrication; UV-based nano imprint lithography; fiber-to-waveguide gold grating couplers; silicon-on-insulator chip; Fabrication; Fiber gratings; Filling; Gold; Lithography; Optical coupling; Optical fiber couplers; Optical waveguides; Refractive index; Silicon on insulator technology;
Conference_Titel :
IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
Conference_Location :
Portland, OR
Print_ISBN :
1-4244-0926-8
Electronic_ISBN :
1099-4742
DOI :
10.1109/LEOSST.2007.4288342
