• DocumentCode
    3234276
  • Title

    Implantable Multichannel Silicon-based neural probe

  • Author

    Weihua, Pei ; Hongda, Chen ; Ruoxin, Zhang ; Xiaohong, Sui ; Lin, Zhu ; Lin, Lu

  • Author_Institution
    Tsinghua Univ., Beijing
  • fYear
    2007
  • fDate
    23-25 July 2007
  • Firstpage
    90
  • Lastpage
    91
  • Abstract
    A kind of silicon oxide based multi-channel neural probe array is reported. It has four shafts and twenty recording sites. Processes to fabricate the microelectrode and test results were described.
  • Keywords
    biological techniques; biomedical electrodes; microelectrodes; probes; prosthetics; silicon compounds; SiO2; implants; microelectrode; multichannel silicon-based neural probe; silicon oxide; Bonding; Electrodes; Fabrication; Frequency; Gold; Impedance; Microelectrodes; Probes; Silicon; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
  • Conference_Location
    Portland, OR
  • ISSN
    1099-4742
  • Print_ISBN
    1-4244-0926-8
  • Electronic_ISBN
    1099-4742
  • Type

    conf

  • DOI
    10.1109/LEOSST.2007.4288346
  • Filename
    4288346