Title :
Design and fabrication of a MEMS-based multi-sensor
Author :
Eun, Duk-Soo ; Kong, Dae-Young ; Yoo, Hyun-Jun ; Hong, Young-Myong ; Jang, Jong-Min ; Kang, Tae-Wook ; Yu, In-Sik ; Lee, Jong-Hyun
Author_Institution :
Dept. of Electron., Kyungpook Nat. Univ., Daegu
Abstract :
In this paper, a newly-designed tamper detection multi-sensor with various functions is proposed. The multi-sensor consists of three different sensors, a piezoresistive sensor with and without mass, a proximity sensor, and a photodiode sensor, which use MEMS technology. The various components of the multi-sensor, could perceive different types of external tampers independently, resulting in more reliable responses. The multi-sensor could be applied to detect external tampers on various types of system and mobile units.
Keywords :
microsensors; photodiodes; MEMS technology; photodiode sensor; piezoresistive sensor; proximity sensor; Capacitive sensors; Fabrication; Industrial training; Intelligent sensors; Mechanical sensors; Micromechanical devices; Photodiodes; Piezoresistance; Sensor systems; Vibrations; multi-sensor; photodiode sensor; piezoresistive sensor; proximity sensor;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484401
