Title :
Nanoimprint and nano-machining process for tunable hollow waveguide devices
Author :
Takeishi, Tomofumi ; Suda, Satoshi ; Koyama, Fumio
Author_Institution :
Tokyo Inst. of Technol., Yokohama
Abstract :
We present the fabrication of circular grating based on nanoimprint and nano-machining process. We successfully demonstrate the nanoimprint of circular grating with pitch of 780 nm for large-area tunable hollow waveguide devices.
Keywords :
diffraction gratings; micromachining; nanolithography; optical fabrication; optical waveguides; circular grating; distance 780 nm; hollow waveguide devices; nanoimprint process; nanomachining; tunable waveguide devices; Gratings; Hollow waveguides; Nanolithography; Nanoscale devices; Optical device fabrication; Optical devices; Optical surface waves; Optical waveguides; Shape control; Substrates;
Conference_Titel :
IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
Conference_Location :
Portland, OR
Print_ISBN :
1-4244-0926-8
Electronic_ISBN :
1099-4742
DOI :
10.1109/LEOSST.2007.4288363
