DocumentCode
3234653
Title
Nanoimprint and nano-machining process for tunable hollow waveguide devices
Author
Takeishi, Tomofumi ; Suda, Satoshi ; Koyama, Fumio
Author_Institution
Tokyo Inst. of Technol., Yokohama
fYear
2007
fDate
23-25 July 2007
Firstpage
123
Lastpage
124
Abstract
We present the fabrication of circular grating based on nanoimprint and nano-machining process. We successfully demonstrate the nanoimprint of circular grating with pitch of 780 nm for large-area tunable hollow waveguide devices.
Keywords
diffraction gratings; micromachining; nanolithography; optical fabrication; optical waveguides; circular grating; distance 780 nm; hollow waveguide devices; nanoimprint process; nanomachining; tunable waveguide devices; Gratings; Hollow waveguides; Nanolithography; Nanoscale devices; Optical device fabrication; Optical devices; Optical surface waves; Optical waveguides; Shape control; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE/LEOS Summer Topical Meetings, 2007 Digest of the
Conference_Location
Portland, OR
ISSN
1099-4742
Print_ISBN
1-4244-0926-8
Electronic_ISBN
1099-4742
Type
conf
DOI
10.1109/LEOSST.2007.4288363
Filename
4288363
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