Study of fabricated system based on laser

Author

Wu, Yong ; Fu, Xing ; Hu, Xiaotang

Author_Institution

State Key Lab. of Precision Meas. Technol. & Instrum., Tianjin Univ., Tianjin

fYear

2008

fDate

6-9 Jan. 2008

Firstpage

677

Lastpage

680

Abstract

A digital multifunctional laser machining system, including mechanical structure, software of computer and control system, is designed. After briefly describing the laser machining system and principle of data processing, some objects are processed by CO₂ laser (75W). By analyzing experimental data and adding in error compensation, the structures with better quality are machined. In order to realize micro fabrication, a ultraviolet laser replaces CO₂ laser. With different laser parameters, some micro silicon structures will be fabricated. And a morphological characteristic is evaluated by optical microscopy.

Keywords

error compensation; laser beam machining; optical microscopy; silicon; surface morphology; data processing; digital multifunctional laser machining system; error compensation; micro silicon structures; microfabrication; morphological characteristic; optical microscopy; ultraviolet laser; Control systems; Data analysis; Data processing; Error compensation; Machining; Optical control; Optical design; Optical device fabrication; Optical microscopy; Software; control system; fabricated system; micro fabrication; silicon; ultraviolet laser;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-1907-4

Electronic_ISBN

978-1-4244-1908-1

Type

conf

DOI

10.1109/NEMS.2008.4484420

Filename

4484420