Vibration investigation of clamped-clamped microbeam of MEMS capacitive switch under mechanical shock

A numerical analytical method based on multi-mode Galerkin discretization is presented to investigate the nonlinear response of the clamped-clamped microbeam of the MEMS capacitive switch under the different mechanical shock loads. The results show that using five or more modes can be sufficient to capture the nonlinear dynamic response of clamped-clamped microbeam, and the microbeam experiences a mechanical shock load as a quasi-static load or a dynamic load depending on the ration between the natural periods of the structure and the period or requency of the shock load. Moreover, the proposed method gives the identical results to other numerical methods in the literature, and is straightforward to implement and could save computation efforts while not losing accuracy.