• DocumentCode
    3235271
  • Title

    Technology changes in the field of sensors

  • Author

    Weyrich, Claus

  • Author_Institution
    Siemens AG, Munich, West Germany
  • fYear
    1989
  • fDate
    8-12 May 1989
  • Abstract
    Summary form only given. The history and current status of sensor technology are reviewed. It is predicted that modern technologies such as thin- or thick-film fabrication or silicon process technology will initiate evolutional processes rather than a revolution of silicon sensors, with classical sensors and their silicon counterparts sharing future applications (the latter for mass applications: the former for special purposes where delicate specifications or environmental conditions cannot be met by the physical properties of silicon)
  • Keywords
    electric sensing devices; history; semiconductor devices; thick film devices; thin film devices; Si; current status; history; sensor technology; silicon process technology; silicon sensors; thick-film fabrication; thin-film fabrication; Acoustic sensors; Chemical sensors; Consumer electronics; Intelligent sensors; Mechanical sensors; Microprocessors; Production; Silicon; Thick films; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    CompEuro '89., 'VLSI and Computer Peripherals. VLSI and Microelectronic Applications in Intelligent Peripherals and their Interconnection Networks', Proceedings.
  • Conference_Location
    Hamburg
  • Print_ISBN
    0-8186-1940-6
  • Type

    conf

  • DOI
    10.1109/CMPEUR.1989.93324
  • Filename
    93324