DocumentCode
3235271
Title
Technology changes in the field of sensors
Author
Weyrich, Claus
Author_Institution
Siemens AG, Munich, West Germany
fYear
1989
fDate
8-12 May 1989
Abstract
Summary form only given. The history and current status of sensor technology are reviewed. It is predicted that modern technologies such as thin- or thick-film fabrication or silicon process technology will initiate evolutional processes rather than a revolution of silicon sensors, with classical sensors and their silicon counterparts sharing future applications (the latter for mass applications: the former for special purposes where delicate specifications or environmental conditions cannot be met by the physical properties of silicon)
Keywords
electric sensing devices; history; semiconductor devices; thick film devices; thin film devices; Si; current status; history; sensor technology; silicon process technology; silicon sensors; thick-film fabrication; thin-film fabrication; Acoustic sensors; Chemical sensors; Consumer electronics; Intelligent sensors; Mechanical sensors; Microprocessors; Production; Silicon; Thick films; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
CompEuro '89., 'VLSI and Computer Peripherals. VLSI and Microelectronic Applications in Intelligent Peripherals and their Interconnection Networks', Proceedings.
Conference_Location
Hamburg
Print_ISBN
0-8186-1940-6
Type
conf
DOI
10.1109/CMPEUR.1989.93324
Filename
93324
Link To Document