Nonlinear lumped electrical model for contour mode AlN resonators

Author

Segovia-Fernandez, Jeronimo ; Tazzoli, Augusto ; Rinaldi, Matteo ; Piazza, Gianluca

Author_Institution

Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA, USA

fYear

2011

fDate

18-21 Oct. 2011

Firstpage

1846

Lastpage

1849

Abstract

This paper presents a lumped electrical model to simulate the nonlinear behavior of aluminum nitride contour mode resonators. The model is derived from the Duffing equation and validated through experiments. Amplitude-frequency (A-f) and third order intermodulation distortion (IMD3) measurements were performed to extract an equivalent nonlinear coefficient α. The two experiments yield the same results when the system is dominated by thermally-induced nonlinearities. In case of high frequency modulations, purely mechanical non-linearity can also be extracted.

Keywords

intermodulation; resonators; Duffing equation; aluminum nitride contour mode resonator; amplitude frequency; contour mode AlN resonator; equivalent nonlinear coefficient; high frequency modulation; nonlinear behavior; nonlinear lumped electrical model; thermally induced nonlinearity; third order intermodulation distortion measurement; Acoustics; Electrodes; Frequency measurement; Integrated circuit modeling; Mathematical model; Resonant frequency; Temperature measurement; AlN contour mode resonator; Duffing equation; amplitude-frequency; intermodulation distortion; lumped electrical model; nonlinearities; thermal effect;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2011 IEEE International

Conference_Location

Orlando, FL

ISSN

1948-5719

Print_ISBN

978-1-4577-1253-1

Type

conf

DOI

10.1109/ULTSYM.2011.0461

Filename

6293681