A touch mode capacitive pressure sensor with long linear range and high sensitivity

Author

Lv, Haojie ; Guo, Qiang ; Hu, Guoqing

Author_Institution

Dept. of Mech. & Electr. Eng., Xiamen Univ., Xiamen

fYear

2008

fDate

6-9 Jan. 2008

Firstpage

796

Lastpage

800

Abstract

A novel structure was developed which can improve linear range and sensitivity of touch mode capacitive pressure sensor (TMCPS) in this article. As for the double-notch touch mode capacitive pressure sensor (DTMCPS), an additional thin notch was etched on the bottom diaphragm of traditional TMCPS. Through modeling and analysis, it has been proven that the linear range can be expanded compared with normal structure with same size and the sensitivity can be improved compared with normal structure with same touch point pressure. Furthermore, the fabrication process of DTMCPS was compiled.

Keywords

capacitive sensors; pressure sensors; sensitivity; tactile sensors; double-notch touch mode capacitive pressure sensor; linear range; sensitivity; touch point pressure; Capacitance; Capacitive sensors; Electrodes; Fabrication; Insulation; Mechanical sensors; Sensor arrays; Sensor systems; Tactile sensors; Temperature sensors; DTMCPS; Finite element analysis (FEA); Touch mode capacitive pressure sensor (TMCPS);

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-1907-4

Electronic_ISBN

978-1-4244-1908-1

Type

conf

DOI

10.1109/NEMS.2008.4484445

Filename

4484445