Title :
A touch mode capacitive pressure sensor with long linear range and high sensitivity
Author :
Lv, Haojie ; Guo, Qiang ; Hu, Guoqing
Author_Institution :
Dept. of Mech. & Electr. Eng., Xiamen Univ., Xiamen
Abstract :
A novel structure was developed which can improve linear range and sensitivity of touch mode capacitive pressure sensor (TMCPS) in this article. As for the double-notch touch mode capacitive pressure sensor (DTMCPS), an additional thin notch was etched on the bottom diaphragm of traditional TMCPS. Through modeling and analysis, it has been proven that the linear range can be expanded compared with normal structure with same size and the sensitivity can be improved compared with normal structure with same touch point pressure. Furthermore, the fabrication process of DTMCPS was compiled.
Keywords :
capacitive sensors; pressure sensors; sensitivity; tactile sensors; double-notch touch mode capacitive pressure sensor; linear range; sensitivity; touch point pressure; Capacitance; Capacitive sensors; Electrodes; Fabrication; Insulation; Mechanical sensors; Sensor arrays; Sensor systems; Tactile sensors; Temperature sensors; DTMCPS; Finite element analysis (FEA); Touch mode capacitive pressure sensor (TMCPS);
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484445
