Title :
Micro and nano structured reaction device for micro DMFC
Author :
Wu, Yi-Shiuan ; Tseng, Fan-Gang ; Tsai, Chuen-Hung ; Chieng, Ching-Chang
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu
Abstract :
This paper proposes a novel reaction device design for micro direct methanol fuel cell (muDMFC) with the combination of micro and nano structures for the enhancement of reaction area. The device combined micro porous Si thin film by DRIE with the growth of high-aspect-ratio carbon nanotubes (CNTs) with specific direction on the vertical sidewall surfaces of micro holes to increase the reaction area by 3-4 orders. By the loading of Pt nanoparticles on CNTs, this device would be applied to the anode or cathode in muDMFC. SEM clearly showed well controlled 100~150-mum-deep micro holes with CNTs growth on the sidewall with the diameter of 80~100 nm and length of 3~5 mum. It is suggested that the reaction performance can be improved by orders of magnitude when both the micro structures and CNTs combine together.
Keywords :
carbon nanotubes; direct methanol fuel cells; sputter etching; DRIE; high-aspect-ratio carbon nanotubes; microDMFC; microdirect methanol fuel cell; microholes; microporous Si thin film; microstructured reaction device; nanostructured reaction device; vertical sidewall surfaces; Anodes; Cathodes; Electrodes; Fuel cells; Methanol; Oxidation; Semiconductor thin films; Surface morphology; Systems engineering and theory; Thin film devices; μDMFC; CNTs; reaction device;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484449