Title :
Mode shape and failure analysis of high frequency MEMS/NEMS using Raman Spectroscopy
Author :
Hedley, John ; Hu, Zhongxu ; Arce-Garcia, Isabel ; Gallacher, Barry J.
Author_Institution :
Sch. of Mech. & Syst. Eng., Newcastle Univ., Newcastle upon Tyne
Abstract :
This paper reports on the use of Raman spectroscopy to characterize the motion of high frequency MEMS/NEMS. The change in Raman signal from a device driven into resonance at 101 KHz was used to indicate the mode shape at that frequency and the strain induced during the oscillation. The results are in good agreement with a finite element model of the structure. The results were also used to predict device failure during excessive vibration.
Keywords :
Raman spectroscopy; failure analysis; finite element analysis; micromechanical devices; nanotechnology; MEMS; NEMS; Raman signal; Raman spectroscopy; failure analysis; finite element model; mode shape; Capacitive sensors; Failure analysis; Finite element methods; Frequency; Micromechanical devices; Nanoelectromechanical systems; Raman scattering; Resonance; Shape; Spectroscopy; MEMS characterization; Raman spectroscopy; failure analysis;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484455
