Title :
A 20kw 6KHz PRF compact water cooled supply for high repetition rate excimer lasers
Author :
Bees, G.L. ; Tydeman, A.
Author_Institution :
Lambda Americas Inc., Neptune, NJ
Abstract :
As integrated circuit feature size maintains pace with Moore´s law, the demands of DUV light sources and excimer lasers grow ever more challenging. Each DUV excimer laser requires a power supply capable of delivering rapid, and accurate, high voltage pulses at extremely high repetition rates. This paper presents a new design of power supply that can deliver 20 kW average power at voltages up to 2500 V, repetition rates up to 6 kHz, and pulse-to-pulse stability a low as plusmn1.25 Volts
Keywords :
excimer lasers; pulsed power supplies; ultraviolet sources; 20 kW; 6 kHz; DUV light sources; Moore law; PRF compact; deep UV light sources; excimer laser; high voltage pulse; integrated circuit; power supply design; pulse recurrence frequency; pulse-to-pulse stability; water cooled supply; Bridge circuits; Circuit topology; Inductors; Power lasers; Power supplies; Pulsed power supplies; Resonance; Stability; Switches; Voltage;
Conference_Titel :
Power Modulator Symposium, 2004 and 2004 High-Voltage Workshop. Conference Record of the Twenty-Sixth International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-8586-1
DOI :
10.1109/MODSYM.2004.1433510
