Title :
AEMPES: an expert system for in-situ diagnostics and process monitoring
Author_Institution :
North Carolina Univ., Charlotte, NC, USA
Abstract :
AEMPES (Advanced Electronic Materials Processing Expert System), an expert system for in-situ diagnostics and process monitoring, is being developed. This system is a key component of intelligent manufacturing equipment architecture and is intended to integrate the manufacturing line with its simulator. In the expert system, there are two interrelated subsystems: a neural network subsystem for adaptive process control, monitoring, and learning; and a rule-based subsystem for human interface and high-level AI (artificial intelligence) reasoning. Also presented is a neural network software, INNSE (Interactive Neural Network Simulation Environment)
Keywords :
computerised monitoring; expert systems; neural nets; process computer control; semiconductor technology; AEMPES; Advanced Electronic Materials Processing Expert System; INNSE; Interactive Neural Network Simulation Environment; adaptive process control; artificial intelligence; expert system; human interface; in-situ diagnostics; intelligent manufacturing equipment architecture; neural network software; neural network subsystem; process monitoring; rule-based subsystem; Adaptive control; Adaptive systems; Artificial intelligence; Artificial neural networks; Diagnostic expert systems; Electronic equipment manufacture; Materials processing; Monitoring; Programmable control; Virtual manufacturing;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1990. ISMSS 1990., IEEE/SEMI International
Conference_Location :
Burlingame, CA
DOI :
10.1109/ISMSS.1990.66129