Title :
Design of temperature controlled micro-hotplate for CMOS CO sensor
Author :
Peng, Benxian ; Yu, Ting ; Yu, Fengqi
Author_Institution :
Dept. of Integrated Electron., Chinese Acad. of Sci., Shenzhen
Abstract :
A novel design for the temperature control of a micro-hotplate gas sensor is presented. Finite difference algorithm is developed to solve the sensor temperature stability problem under ambient air interference. A simple circuit is proposed to accurately adjust the micro-hotplate temperature with a resolution of 0.04degC. The proposed sensor has ultra low power consumption (about 13.9 muW) and is a good candidate for wireless sensor network applications.
Keywords :
CMOS integrated circuits; gas sensors; microsensors; temperature control; CMOS CO sensor; ambient air interference; microhotplate gas sensor; sensor temperature stability; temperature controlled microhotplate; Boundary conditions; Finite difference methods; Fluctuations; Gas detectors; Isothermal processes; Temperature control; Temperature distribution; Temperature sensors; Thermal conductivity; Wireless sensor networks; CO sensor; Finite difference algorithm; Micro-hotplate; subthreshold region;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484467
