DocumentCode :
3235851
Title :
Advancements in micromachined PC-MUTs for medical devices
Author :
Liang, Y. ; Snook, K.A. ; Dunkin, B.M. ; Sahul, R. ; Hackenberger, W.S.
Author_Institution :
TRS Technol., Inc., State College, PA, USA
fYear :
2011
fDate :
18-21 Oct. 2011
Firstpage :
1821
Lastpage :
1824
Abstract :
The previously reported piezoelectric composite-based micromachined ultrasound transducer (PC-MUT) technology for single crystal lead magnesium niobate-lead titanate (PMN-PT) 1-3 composites has been extended to incorporate multiple resonances, and different resonance modes and patterning. Micromachining provides the capability for patterning that is very difficult using conventional dicing, and designs incorporating multiple resonances in a single device were fabricated. This included both the kt and k33 modes in a composite of single thickness, and multiple k32 lateral resonances for <;110>; poled PMN-PT using multiple length bars. These designs have distinct advantages for wideband transducers, including dermatology and bone health evaluation.1 Resonance frequencies from 0.3 MHz to 30 MHz were seen with the different techniques.
Keywords :
biomedical transducers; bone; cellular biophysics; lead compounds; micromachining; orthopaedics; piezoceramics; piezoelectric devices; skin; ultrasonic transducers; PMN-PbTiO3; bone health evaluation; conventional dicing; dermatology; frequency 0.3 MHz to 30 MHz; k33 modes; kt modes; medical devices; micromachined PC-MUT; multiple k32 lateral resonances; multiple length bars; piezoelectric composite-based micromachined ultrasound transducer technology; single crystal lead magnesium niobate-lead titanate 1-3 composites; wideband transducers; Acoustics; Bandwidth; Bones; Crystals; Impedance; Resonant frequency; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
ISSN :
1948-5719
Print_ISBN :
978-1-4577-1253-1
Type :
conf
DOI :
10.1109/ULTSYM.2011.0455
Filename :
6293705
Link To Document :
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