DocumentCode :
3235993
Title :
Application of wavelet transform in optical thin film defect automatic inspection system
Author :
Kuo, Chung-Feng Jeffrey ; Chiu, Chin-Hsun ; Peng, Kai-Ching
Author_Institution :
Grad. Inst. of Autom. & Control, Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan
fYear :
2011
fDate :
10-13 July 2011
Firstpage :
230
Lastpage :
233
Abstract :
This paper applied digital image processing technology to the defect inspection of optical thin film products. It first used wavelet transform on the image for two times to reduce the size. Then the edge of the defect would be found out through the screening of the isotropic results after 45 degrees and 90 degrees increment of Laplace operator, and then used the statistic threshold method to separate the defect image, and in the end used Hough transform to distinguish the defect. The experimental result showed that it could test all the flaws on the 100 sheets of images, and successfully distinguished the spot defect and line defect, the distinguish rate is 96%, and it only cost 0.9 sec to detect a sheet. Therefore it has clear that this paper has successfully developed a set of real time defect inspection system applicable to the optical thin film.
Keywords :
Hough transforms; Laplace transforms; automatic optical inspection; image processing; materials science computing; optical films; thin films; wavelet transforms; Hough transform; Laplace operator; digital image processing technology; image defect; isotropic screening; line defect; optical thin film defect automatic inspection system; spot defect; statistic threshold method; time 0.9 s; wavelet transform; Automatic optical inspection; Image edge detection; Optical films; Optical imaging; Wavelet transforms; Defect inspection system; Hough transform; Laplace operator; Optical thin film; Wavelet transform;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Wavelet Analysis and Pattern Recognition (ICWAPR), 2011 International Conference on
Conference_Location :
Guilin
ISSN :
2158-5695
Print_ISBN :
978-1-4577-0283-9
Type :
conf
DOI :
10.1109/ICWAPR.2011.6014486
Filename :
6014486
Link To Document :
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