C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

Author

Nakahigashi, Yuta ; Yanagitani, Takahiko ; Matsukawa, Mami ; Watanabe, Yoshiaki

Author_Institution

Doshisha Univ., Kyoto, Japan

fYear

2011

fDate

18-21 Oct. 2011

Firstpage

810

Lastpage

813

Abstract

A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K² value in IDT / ZnO (0°, 90°, Ψ) film / silica glass substrate structure showed that maximum value of K² = 3.4 % was found at Ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K² values. Finally, the electrical conductivity of liquid was detected as the velocity change.

Keywords

electrical conductivity measurement; surface acoustic wave sensors; zinc compounds; C-axis parallel oriented film SH-SAW sensor; IDT; ZnO; electrical conductivity measurement; liquid-solid interface; shear horizontal type surface acoustic wave device; silica glass substrate structure; Conductivity; Films; Glass; Liquids; Silicon compounds; Substrates; Zinc oxide; SH-SAW; c-axis parallel oriented ZnO film; sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2011 IEEE International

Conference_Location

Orlando, FL

ISSN

1948-5719

Print_ISBN

978-1-4577-1253-1

Type

conf

DOI

10.1109/ULTSYM.2011.0198

Filename

6293741