Title :
Micro and nano fabricated phononic crystals: technology and applications
Author :
Olsson, Roy H., III ; Ziaei-Moayyed, Maryam ; Kim, Bongsang ; Reinke, Charles ; Su, Mehmet F. ; Hopkins, Patrick ; Soliman, Yasser M. ; Goettler, Drew F. ; Leseman, Zayd C. ; El-Kady, Ihab
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
With the application of microfabrication techniques, phononic crystals have been transformed over the past decade: from hand assembled millimeter-to-meter scale crystals consisting of metal balls in water or epoxy, to precisely machined crystals with sub-micron features operating at frequencies in excess of 1 GHz. This paper reviews the contributions of Sandia National Laboratories to micro and nano scale phononic crystal devices including: the integration of piezoelectric transducers, the choice of phononic crystal materials, phononic crystal design, and the application of phononic crystals to radio frequency and thermal management applications.
Keywords :
acoustic transducers; nanofabrication; phononic crystals; piezoelectric transducers; Sandia National Laboratories; epoxy; hand assembled millimeter-to-meter scale crystals; metal balls; microfabricated phononic crystals; microfabrication technique; microscale phononic crystal device; nanofabricated phononic crystals; nanoscale phononic crystal device; phononic crystal design; phononic crystal materials; piezoelectric transducers; precisely machined crystals; radio frequency applications; submicron feature; thermal management applications; water; Acoustics; Cavity resonators; Crystals; Filling; Lattices; Photonic band gap; Acoustic Bandgap; Elastic Bandgap; Microelectromechanical Systems; Microfabrication; Phononic Bandgap; Phononic Crystal; Phononic Crystal Cavity;
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4577-1253-1
DOI :
10.1109/ULTSYM.2011.0241
