Title :
Analysis of different effect on the response of SAW hydrogen gas sensor
Author :
Zhou, Junjing ; Tao, Chunmin ; Yin, Chenbo
Author_Institution :
Mech. & Electron. design & Res. Inst., Jiangxi Blue Sky Univ., Beijing
Abstract :
A three-dimensional finite element model of a surface acoustic wave (SAW) delay line based hydrogen gas sensor on Y- X cut LiNbO3 substrate with a palladium film was developed and simulated using ANSYS platform. The changes of the output voltage were studied due to the exposure of the palladium film to hydrogen, and the effects of the elastic modulus and density changes of the Pd film were analyzed. The effects of the palladium film density decrease and elastic modulus decrease on the SAW hydrogen gas sensor are in opposite ways. The effect resulted from the elastic modulus decrease is more obvious. The impulse response analysis of the device was performed, from which the frequency response and hence a center frequency of about 100 MHz was obtained.
Keywords :
gas sensors; surface acoustic wave sensors; transient response; 3D finite element model; ANSYS platform; SAW hydrogen gas sensor; elastic modulus; impulse response analysis; palladium film; surface acoustic wave; Acoustic waves; Delay lines; Finite element methods; Gas detectors; Hydrogen; Palladium; Performance analysis; Substrates; Surface acoustic waves; Voltage; finite element method(FEM); hydrogen gas sensor; piezoelectric; surface acoustic wave(SAW);
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484525
