Analysis and implementation of MEMS coplanar waveguide on silicon substrate

Author

Wang, Gui ; Chen, Rushan ; Tang, Wanchun

Author_Institution

Sch. of Electron. Eng. & Optoelectron. Tech., Nanjing Univ. of Sci. & Technol., Nanjing, China

fYear

2010

fDate

8-11 May 2010

Firstpage

2071

Lastpage

2074

Abstract

Coplanar waveguides on silicon substrate were simulated. Using MEMS (micro-electro-mechanical system) technology, the V-shaped and W-shaped groove coplanar waveguides were implemented on silicon substrate, and its characteristic impedance was 30Ω, 50Ω, 75Ω and 100Ω respectively. In addition, the characteristic impedance of coplanar waveguide (CPW) was analyzed, and the conclusion was used to guide the design of MEMS CPW. According to the measurement results, insertion loss of coplanar waveguides was below 1dB/mm. If it is fabricated with lower resistivity metal, the insertion loss will be decreased.

Keywords

coplanar waveguides; micromechanical devices; silicon; CPW; MEMS coplanar waveguide; V-shaped groove coplanar waveguide; W-shaped groove coplanar waveguide; insertion loss; micro-electro-mechanical system; silicon substrate; Coplanar transmission lines; Coplanar waveguides; Distributed parameter circuits; Electromagnetic waveguides; Frequency; Impedance; Insertion loss; Micromechanical devices; Silicon; Transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Millimeter Wave Technology (ICMMT), 2010 International Conference on

Conference_Location

Chengdu

Print_ISBN

978-1-4244-5705-2

Type

conf

DOI

10.1109/ICMMT.2010.5525216

Filename

5525216