DocumentCode
3237131
Title
CVD diamond for cold cathode applications
Author
Tzeng, Y. ; Liu, C. ; Liu, Y.K. ; Cheng, A.J.
Author_Institution
Dept. of Electr. & Comput. Eng., Auburn Univ., AL
fYear
2004
fDate
23-26 May 2004
Firstpage
333
Lastpage
336
Abstract
Microcrystalline and nanocrystalline diamond coatings grown by microwave plasma enhanced chemical vapor deposition (CVD) techniques are examined for their properties for applications as cold cathodes. Low-field electron field emission and high-yield secondary electron emission are promising properties of diamond and for applications to power modulators
Keywords
diamond; electron field emission; modulators; nanostructured materials; plasma CVD coatings; secondary electron emission; CVD diamond; cold cathode applications; high-yield secondary electron emission; low-field electron field emission; microcrystalline diamond coatings; microwave plasma enhanced chemical vapor deposition; nanocrystalline diamond coatings; power modulators; Application software; Cathodes; Chemical vapor deposition; Coatings; Electron emission; Hydrogen; Plasma chemistry; Plasma properties; Substrates; Surface cleaning;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Modulator Symposium, 2004 and 2004 High-Voltage Workshop. Conference Record of the Twenty-Sixth International
Conference_Location
San Francisco, CA
Print_ISBN
0-7803-8586-1
Type
conf
DOI
10.1109/MODSYM.2004.1433579
Filename
1433579
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