Title :
A systematic approach to identify critical yield sensitive parametric parameters
Author_Institution :
KLA Yield Manage. Group, KLA Instrum. Corp., San Jose, CA, USA
Abstract :
Identifying and eliminating yield limiting factors is a critical requirement for achieving accelerated yield improvement rates. This paper presents a systematic methodology for identifying parametric yield sensitive parameters in a semiconductor process. The method decomposes the product yield into two major components: a non-random systematic yield Ys and a random yield Yr. The systematic yield Ys and all ET (Electrical Test) parameters are then used for the statistical correlation analysis. It divides data into groups and calculates statistics for all ET (Electrical Test) parameters. The critical yield sensitive parameters are identified based on the results of the correlation analysis and the analysis of the statistical significance of the data groups. Applications of the proposed analysis method to many manufacturing lines´ data have been very successful in identifying and quantifying parametric yield sensitivity
Keywords :
correlation theory; integrated circuit testing; integrated circuit yield; production testing; statistical analysis; critical yield sensitive parametric parameters; electrical test parameters; manufacturing line data; product yield decomposition; semiconductor process; statistical correlation analysis; systematic methodology; yield limiting factors identification; Acceleration; Condition monitoring; Conductors; Fault diagnosis; Integrated circuit testing; Parametric statistics; Poisson equations; Probes; Semiconductor device testing; Very large scale integration;
Conference_Titel :
Statistical Metrology, 1997 2nd International Workshop on
Conference_Location :
Kyoto
Print_ISBN :
0-7803-3737-9
DOI :
10.1109/IWSTM.1997.629413
