DocumentCode
3238589
Title
Optimization Approaches of Multizone Furnace Loading Process Control
Author
Pasichnyk, R. ; Wouwer, A. Vande ; Pigovsky, Y.
Author_Institution
Ternopil State Econ. Univ., Ternopil
fYear
2005
fDate
5-7 Sept. 2005
Firstpage
531
Lastpage
535
Abstract
An algorithm for optimal heat treatment in a multizone diffusive furnace is proposed. A mathematical model of the furnace is developed and a performance criterion is defined. This latter criterion is minimized using a procedure based on the simultaneous perturbation stochastic approximation (SPSA) algorithm as well as with the MatLab FMINBND algorithm. Problem simplifications are also considered. Simulation results are discussed.
Keywords
furnaces; heat treatment; optimisation; process control; semiconductor device manufacture; stochastic processes; temperature control; MatLab FMINBND algorithm; multizone diffusive furnace; multizone furnace loading process control; optimal heat treatment; optimization; perturbation stochastic approximation algorithm; Approximation algorithms; Crystals; Furnaces; Heat treatment; Mathematical model; Metallization; Process control; Silicon; Space heating; Temperature; temperature control; thermal system;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Data Acquisition and Advanced Computing Systems: Technology and Applications, 2005. IDAACS 2005. IEEE
Conference_Location
Sofia
Print_ISBN
0-7803-9445-3
Electronic_ISBN
0-7803-9446-1
Type
conf
DOI
10.1109/IDAACS.2005.283040
Filename
4062191
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