Title :
Robust design for VLSI process and device
Author_Institution :
United Microelectron. Corp., Hsinchu, Taiwan
Abstract :
This paper presents a comprehensive study of the design-of-experiments techniques for the robust design of VLSI process and device. A device or a process is said to be robust when its performance is very insensitive to the change or variation of process conditions. The focus is on the utilization of orthogonal arrays to design the experiments, and the reduction of the variation (or standard deviation) of the responses to get the robust process condition. Many useful methodologies of design-of-experiments are presented in this paper and three examples of a case study are used to illustrate the procedure of robust design for VLSI process and device
Keywords :
Taguchi methods; VLSI; design of experiments; integrated circuit manufacture; optimisation; statistical process control; IC design; VLSI process; design-of-experiments techniques; orthogonal arrays; process conditions; robust design; Design for experiments; Fabrication; Fluctuations; Mathematical model; Optimization methods; Predictive models; Process design; Response surface methodology; Robustness; Very large scale integration;
Conference_Titel :
Statistical Methodology, IEEE International Workshop on, 2001 6yh.
Conference_Location :
Kyoto
Print_ISBN :
0-7803-6688-3
DOI :
10.1109/IWSTM.2001.933816
