Effective defect management strategies for emerging fab needs

The evolution of wafer fabrication technology and processes has seen different characteristics and varying nature of yield-limiting killer defects on the wafers. This has forced the innovation of a more sensitive and broader range of defect inspection technologies in the marketplace. Given the changing nature of defect characteristics, the multiple choices of inspection technologies, and the increasing magnitudes of fab investment costs, the problem of determining an effective defect inspection strategy for a fab has become increasingly complex. In this paper, we present the essential steps required to design and implement a cost optimal defect management strategy