• DocumentCode
    3243023
  • Title

    Author index

  • fYear
    1999
  • fDate
    9-11 May 1999
  • Firstpage
    212
  • Lastpage
    213
  • Abstract
    The author index contains an entry for each author and coauthor included in the proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Process-Induced Damage, 1999 4th International Symposium on
  • Conference_Location
    Monterey, CA, USA
  • Print_ISBN
    0-9651577-3-3
  • Type

    conf

  • DOI
    10.1109/PPID.1999.798851
  • Filename
    798851