DocumentCode
3244911
Title
High sensitive surface micromachined out of plane tunneling accelerometers with low-g resolution
Author
Patra, Srijita ; Bhattacharyya, Tarun K.
Author_Institution
Electron. & Electr. Commun. Eng. Dept., Indian Inst. of Technol., Kharagpur, India
fYear
2009
fDate
14-17 July 2009
Firstpage
1577
Lastpage
1581
Abstract
The paper presents design, fabrication and performance analysis of out-of-plane tunneling accelerometers of different configurations. The tunneling structures have been realized by standard surface micromachined process. This work also records the relative performance of the devices to achieve high sensitivity, high dynamic range and low cross axis sensitivity for sub dasiagpsila measurement at relatively low actuation voltage.
Keywords
accelerometers; micromachining; tunnelling; MEMS; high-sensitive surface micromachining process; low-cross axis sensitivity; low-g resolution; out-of-plane tunneling accelerometers; Acceleration; Accelerometers; Acoustic measurements; Dynamic range; Electrons; Fabrication; Micromechanical devices; Seismic measurements; Space technology; Tunneling; Folded-beam; High dynamic range; Low cross axis sensitivity; Quadbeam; Tunneling accelerometer;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics, 2009. AIM 2009. IEEE/ASME International Conference on
Conference_Location
Singapore
Print_ISBN
978-1-4244-2852-6
Type
conf
DOI
10.1109/AIM.2009.5229848
Filename
5229848
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