Title :
Computer integrated inspection system for aluminum nitride substrate manufacturing
Author :
Mathieson, C.B. ; Dziomba, G.E. ; Garapati, S.S. ; Miloscia, W.J.
Author_Institution :
Carborundum Co., Niagara Falls, NY, USA
Abstract :
The development and implementation of integrated inspection systems for aluminum nitride substrates are described. The evolution of testing methods through development and new technology concepts is discussed. The integration of the testing methods into a robotic work cell is considered, followed by a description of the control architecture. It is concluded that this project has increased productivity by relieving skilled technicians of everyday inspection tasks and associated paperwork. By integrating the inspections and eliminating manual material handling, machine utilization has been increased by 300%
Keywords :
aluminium compounds; computerised instrumentation; inspection; packaging; quality control; substrates; AlN substrate manufacturing; computer integrated inspection system; control architecture; development; evolution of testing methods; implementation; integrated inspection systems; machine utilization; productivity; robotic work cell; Aluminum nitride; Automatic testing; Computer aided manufacturing; Computer integrated manufacturing; Inspection; Productivity; Rapid thermal processing; Robots; Temperature; Thermal conductivity;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1989, Proceedings. Seventh IEEE/CHMT International
Conference_Location :
San Francisco, CA
DOI :
10.1109/EMTS.1989.68998
