Master-slave synchronous position control for precision stages based on multirate control and dead-time compensation

A synchronous position control system based on master-slave method is often required in industrial equipment, for example, NC machine tools, exposure systems, and so on. The authors´ research group has achieved precise positioning whose error tolerance is in sub-micrometer range for a large-scaled high-precision stage with perfect tracking control (PTC). In this paper, we propose a novel synchronous position control system for a pair of precision stages based on multirate control and dead-time compensation. Finally, simulations and experiments with experimental precision stages are performed to show the advantages of the proposed control system.