Effects of power-supply parasitic components on substrate noise generation in large-scale digital circuits

Activity controllable noise source and arrayed substrate voltage detectors use a 0.25-/spl mu/m, 2.5-V CMOS technology and enable substrate noise measurements with controlled logic density/activity distributions. These circuits are used for exploring effects of power-supply parasitic components on substrate noise generation in practical large-scale CMOS digital circuits. Spatially distributed parasitic impedances on power-supply and return wirings cause the noise generation locally, and moreover, screen the effect of noise attenuation by parasitic capacitances of logic elements working as charge reservoirs.