Title :
A CAD coupled laser beam test system for digital circuit failure analysis
Author :
Fritz, J. ; Lackmann, R.
Author_Institution :
Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, West Germany
Abstract :
A nondestructive automated digital test system is described. It consists of a laser scanning microscope (LSM) coupled to a CAD (computer-aided design) layout database. Logic state detection and automated failure analysis in CMOS circuits can be done without the need of vacuum and with a minimum of circuit environment preparation. The coupling of the LSM and the CAD layout database leads to automated node location and shortens the failure search because it enables the user to backtrace signal interconnections inside the circuit during the local test session. The system´s performance is explained by considering a typical application example, an operational amplifier in mixed bipolar/CMOS technology
Keywords :
CMOS integrated circuits; automatic test equipment; computerised instrumentation; digital integrated circuits; failure analysis; integrated circuit testing; measurement by laser beam; nondestructive testing; CAD coupled laser beam test system; CAD layout database; CMOS circuits; LSM; application example; automated failure analysis; automated node location; backtrace signal interconnections; digital circuit failure analysis; laser scanning microscope; local test session; logic state detection; mixed bipolar/CMOS technology; nondestructive automated digital test system; op amp in BiCMOS; operational amplifier; shortened failure search; Automatic testing; CMOS logic circuits; Circuit testing; Coupling circuits; Databases; Design automation; Digital circuits; Laser beams; Optical coupling; System testing;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1989, Proceedings. Seventh IEEE/CHMT International
Conference_Location :
San Francisco, CA
DOI :
10.1109/EMTS.1989.69000
