DocumentCode
3249694
Title
Investigation of a mesh criterion for three-dimensional finite element diffusion simulation
Author
Fleischmann, P. ; Haindl, B. ; Kosik, R. ; Selberherr, S.
Author_Institution
Inst. for Microelectron., Tech. Univ. Wien, Austria
fYear
1999
fDate
1999
Firstpage
71
Lastpage
74
Abstract
Three simple mesh examples are presented to show that neither Delaunay nor strictly non-obtuse mesh elements are required for a finite element diffusion computation. Mesh requirements based on a recently found condition are investigated to guarantee certain properties of the resulting stiffness matrix. The experiments are conducted using the general purpose solver AMIGOS
Keywords
diffusion; finite element analysis; mathematical operators; mesh generation; semiconductor process modelling; 3D FEM simulation; AMIGOS; Delaunay mesh; Laplace operator; diffusion; discretization scheme; finite element diffusion computation; general purpose solver; mesh criterion; stiffness matrix; Clouds; Computational modeling; Finite element methods; Laplace equations; Microelectronics;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation of Semiconductor Processes and Devices, 1999. SISPAD '99. 1999 International Conference on
Conference_Location
Kyoto
Print_ISBN
4-930813-98-0
Type
conf
DOI
10.1109/SISPAD.1999.799262
Filename
799262
Link To Document