Intercalated carbon: a novel electromechanical material for MEMS actuators and microelectronics

Author

Kading, Glen A. ; Kladitis, Paul E. ; Bragg, Kevin M. ; Mziruyama, B. ; Vogel, F.Lincoln

Author_Institution

Dept. of Electr. & Comput. Eng., Air Force Inst. of Technol., Wright-Patterson Air Force Base, OH

fYear

2005

fDate

7-10 Aug. 2005

Firstpage

143

Abstract

This paper presents intercalated graphite an innovative material for use in MEMS actuators. It demonstrates experimental data from carbon fiber actuators and proposes thin-film carbon actuators. Formed from polyimide compounds, graphitic carbon, when intercalated, produces strain values an order of magnitude better than traditional polysilicon thermal actuators at low voltages. These high strain values at low voltage and current provide a high-force, low-power solution for next-generation MEMS devices

Keywords

carbon fibres; graphite intercalation compounds; microactuators; MEMS actuators; carbon fiber actuators; electromechanical material; graphitic carbon; intercalated carbon; intercalated graphite; microelectronics; polyimide compounds; thin-film carbon actuators; Actuators; Capacitive sensors; Carbon compounds; Low voltage; Microelectronics; Micromechanical devices; Optical fiber devices; Organic materials; Polyimides; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2005. 48th Midwest Symposium on

Conference_Location

Covington, KY

Print_ISBN

0-7803-9197-7

Type

conf

DOI

10.1109/MWSCAS.2005.1594059

Filename

1594059