Title :
Intercalated carbon: a novel electromechanical material for MEMS actuators and microelectronics
Author :
Kading, Glen A. ; Kladitis, Paul E. ; Bragg, Kevin M. ; Mziruyama, B. ; Vogel, F.Lincoln
Author_Institution :
Dept. of Electr. & Comput. Eng., Air Force Inst. of Technol., Wright-Patterson Air Force Base, OH
Abstract :
This paper presents intercalated graphite an innovative material for use in MEMS actuators. It demonstrates experimental data from carbon fiber actuators and proposes thin-film carbon actuators. Formed from polyimide compounds, graphitic carbon, when intercalated, produces strain values an order of magnitude better than traditional polysilicon thermal actuators at low voltages. These high strain values at low voltage and current provide a high-force, low-power solution for next-generation MEMS devices
Keywords :
carbon fibres; graphite intercalation compounds; microactuators; MEMS actuators; carbon fiber actuators; electromechanical material; graphitic carbon; intercalated carbon; intercalated graphite; microelectronics; polyimide compounds; thin-film carbon actuators; Actuators; Capacitive sensors; Carbon compounds; Low voltage; Microelectronics; Micromechanical devices; Optical fiber devices; Organic materials; Polyimides; Transistors;
Conference_Titel :
Circuits and Systems, 2005. 48th Midwest Symposium on
Conference_Location :
Covington, KY
Print_ISBN :
0-7803-9197-7
DOI :
10.1109/MWSCAS.2005.1594059
