DocumentCode
3250685
Title
1999 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.99CH36325)
fYear
1999
fDate
14-16 June 1999
Abstract
Presents the front cover from the conference proceedings.
Keywords
CMOS integrated circuits; DRAM chips; VLSI; dielectric thin films; ferroelectric storage; flash memories; integrated circuit reliability; integrated circuit technology; silicon-on-insulator; CMOS technology; DRAM technology; RF devices; SOI technology; channel engineering; dielectric reliability; ferroelectric memories; flash memory; gate dielectrics; interconnect technology; shallow junctions;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1999. Digest of Technical Papers. 1999 Symposium on
Conference_Location
Kyoto, Japan
Print_ISBN
4-930813-93-X
Type
conf
DOI
10.1109/VLSIT.1999.799310
Filename
799310
Link To Document