Low work function addressable silicon field emission single cathode with integrated lateral feedback resistor and suspended heater

We report on the operation of low work function, addressable silicon field emission cathode tips. The emitter tips are suspended at the center of a silicon beam using multiple patterning methods of high aspect ratio silicon structures using a single layer silicon dioxide etch mask. Integrated suspended concentric silicide micro heaters are used to clean and to activate these cathodes. These silicon tips are subsequently modified to improve their emission properties. A much larger emission current with reduced emission noise has been observed when a single tip is cycled through the tip forming process.