Yield analysis for self-repairable MEMS devices

In this paper, the yield analysis for a self-repairable MEMS (SRMEMS) accelerometer design is proposed. The accelerometer consists of (n + m) identical modules: n of them serve as the main device, while the remaining m modules act as the redundancy. The yield model for MEMS redundancy repair is developed by statistical analysis. Based upon the yield model, the yield increase after redundancy repair for the SRMEMS accelerometer is derived. The yield increase versus initial yield for different m numbers is simulated. The simulation results show that the SRMEMS leads to effective yield increase compared to non-BISRS design, especially for a moderate initial yield