Title :
Investigations of spectral peaks, resonance effect and 1/f exponents on noise characteristics of MEMS accelerometers
Author :
Mohd-Yasin, F. ; Korman, C.E. ; Nagel, D.J. ; Chuah, H.T.
Author_Institution :
Fac. of Eng., Multimedia Univ., Selangor, Malaysia
Abstract :
Further investigations of the noise characteristics of MEMS accelerometers at different accelerations are presented. In the previously published work, the results show 1/f-type noise at low frequencies and white noise at high frequencies. The magnitude of the noise spectral density is acceleration dependent. In this paper, we probe further to investigate the spectral peaks which exist on all three accelerometers noise characteristics. Secondly, we perform analysis to find the 1/f exponents for all accelerometers noise characteristics. We also perform additional experiments to show the resonance effect of the noise characteristics.
Keywords :
1/f noise; accelerometers; micromechanical devices; noise measurement; resonance; white noise; 1/f exponents; 1/f noise; MEMS accelerometers; noise characteristics; noise spectral density; resonance effect; spectral peaks; white noise; Acceleration; Accelerometers; Circuit noise; Frequency; Low-frequency noise; Micromechanical devices; Noise measurement; Resonance; Seismic measurements; Surface resistance;
Conference_Titel :
Microelectronics, 2004. ICM 2004 Proceedings. The 16th International Conference on
Print_ISBN :
0-7803-8656-6
DOI :
10.1109/ICM.2004.1434215
