Investigations of spectral peaks, resonance effect and 1/f exponents on noise characteristics of MEMS accelerometers

Author

Mohd-Yasin, F. ; Korman, C.E. ; Nagel, D.J. ; Chuah, H.T.

Author_Institution

Fac. of Eng., Multimedia Univ., Selangor, Malaysia

fYear

2004

fDate

6-8 Dec. 2004

Firstpage

93

Lastpage

96

Abstract

Further investigations of the noise characteristics of MEMS accelerometers at different accelerations are presented. In the previously published work, the results show 1/f-type noise at low frequencies and white noise at high frequencies. The magnitude of the noise spectral density is acceleration dependent. In this paper, we probe further to investigate the spectral peaks which exist on all three accelerometers noise characteristics. Secondly, we perform analysis to find the 1/f exponents for all accelerometers noise characteristics. We also perform additional experiments to show the resonance effect of the noise characteristics.

Keywords

1/f noise; accelerometers; micromechanical devices; noise measurement; resonance; white noise; 1/f exponents; 1/f noise; MEMS accelerometers; noise characteristics; noise spectral density; resonance effect; spectral peaks; white noise; Acceleration; Accelerometers; Circuit noise; Frequency; Low-frequency noise; Micromechanical devices; Noise measurement; Resonance; Seismic measurements; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2004. ICM 2004 Proceedings. The 16th International Conference on

Print_ISBN

0-7803-8656-6

Type

conf

DOI

10.1109/ICM.2004.1434215

Filename

1434215