CMOS-integrated digitally controlled DC-DC voltage converter with voltage and time configurations for on-chip high voltage MEMS switch actuation

Author

Ghannam, M.Y. ; Adly, I. ; Tilmans, H.A.C. ; De Raedt, W. ; Mertens, R.P.

Author_Institution

Coll. of Sci. & Eng., American Univ. in Cairo, Egypt

fYear

2004

fDate

6-8 Dec. 2004

Firstpage

97

Lastpage

100

Abstract

In this work a digitally controlled dc-dc voltage converter circuit aimed at providing on-chip high voltage for MEMS switch actuation is developed. The chip including an analog voltage converter and a digital controller is fabricated in a 0.7 μm CMOS high voltage/low voltage technology and occupies 11.84 mm² Si area. A maximum voltage of 32 V is attained in the realized prototype but higher levels are possible with modified converter designs. Multilevel driving voltage waveforms are demonstrated with successful configuration of the voltage level and time of selected intervals.

Keywords

CMOS digital integrated circuits; digital control; elemental semiconductors; integrated circuit design; integrated circuit testing; microswitches; power integrated circuits; silicon; system-on-chip; 0.7 micron; 32 V; CMOS integrated circuits; CMOS technology; DC-DC voltage converter; MEMS switch actuation; Si; analog voltage converter; digital controller; multilevel driving voltage waveforms; on-chip high voltage; Analog-digital conversion; CMOS technology; Circuits; DC-DC power converters; Digital control; Low voltage; Microswitches; Prototypes; Switching converters; Voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2004. ICM 2004 Proceedings. The 16th International Conference on

Print_ISBN

0-7803-8656-6

Type

conf

DOI

10.1109/ICM.2004.1434216

Filename

1434216