Title :
CMOS-integrated digitally controlled DC-DC voltage converter with voltage and time configurations for on-chip high voltage MEMS switch actuation
Author :
Ghannam, M.Y. ; Adly, I. ; Tilmans, H.A.C. ; De Raedt, W. ; Mertens, R.P.
Author_Institution :
Coll. of Sci. & Eng., American Univ. in Cairo, Egypt
Abstract :
In this work a digitally controlled dc-dc voltage converter circuit aimed at providing on-chip high voltage for MEMS switch actuation is developed. The chip including an analog voltage converter and a digital controller is fabricated in a 0.7 μm CMOS high voltage/low voltage technology and occupies 11.84 mm2 Si area. A maximum voltage of 32 V is attained in the realized prototype but higher levels are possible with modified converter designs. Multilevel driving voltage waveforms are demonstrated with successful configuration of the voltage level and time of selected intervals.
Keywords :
CMOS digital integrated circuits; digital control; elemental semiconductors; integrated circuit design; integrated circuit testing; microswitches; power integrated circuits; silicon; system-on-chip; 0.7 micron; 32 V; CMOS integrated circuits; CMOS technology; DC-DC voltage converter; MEMS switch actuation; Si; analog voltage converter; digital controller; multilevel driving voltage waveforms; on-chip high voltage; Analog-digital conversion; CMOS technology; Circuits; DC-DC power converters; Digital control; Low voltage; Microswitches; Prototypes; Switching converters; Voltage control;
Conference_Titel :
Microelectronics, 2004. ICM 2004 Proceedings. The 16th International Conference on
Print_ISBN :
0-7803-8656-6
DOI :
10.1109/ICM.2004.1434216
