Title :
A new structure of field emitter arrays
Author :
Itoh, S. ; Niiyama, T. ; Taniguchi, M. ; Watanabe, T.
Author_Institution :
Res. & Dev. Center, Futaba Corp., Chiba, Japan
fDate :
July 30 1995-Aug. 3 1995
Abstract :
Applications of Spindt-type field emitters to field emitter arrays are discussed. The evaluation of a new structure which was fabricated to obtain high current density at high gate voltage without destruction is presented. The emitter arrays are stabilized using a resistive layer and a cathode electrode of mesh structure.
Keywords :
vacuum microelectronics; Spindt-type field emitters; cathode electrode; field emitter arrays; mesh structure; resistive layer; Anodes; Cathodes; Current density; Electrodes; Electron sources; Field emitter arrays; Insulation; Niobium; Voltage; Wiring;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487000
