DocumentCode
3251403
Title
Study of shaping super long tungsten filament array
Author
Chang-Chun Zhu ; Guang-Yi Liu ; Ning Chen ; Wu-Yuan Cui ; Jun-Hua Liu
Author_Institution
Inst. of VME & MEMS, Xi´an Jiaotong Univ., China
fYear
1995
fDate
July 30 1995-Aug. 3 1995
Firstpage
164
Lastpage
167
Abstract
In this paper, we reported three methods of making ohmic contact of the tungsten filament cathode array with the glass as the medium. Also, two shaping techniques of the tungsten filament cathode array were mentioned. Finally, we showed the SEM pictures of the shaping results.
Keywords
cathodes; electron field emission; etching; ohmic contacts; tungsten; vacuum microelectronics; SEM; W; W filament cathode array; field emitter array; glass; ohmic contact formation; shaping techniques; super long filament array; Anodes; Cathodes; Conductive films; Copper; Electrodes; Electrons; Etching; Glass; Tungsten; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location
Portland, OR, USA
Print_ISBN
0-7803-2143-X
Type
conf
DOI
10.1109/IVMC.1995.487016
Filename
487016
Link To Document