Title :
A novel method for fabricating large area metal field emission cathode arrays
Author :
Tian-Ying Li ; Chang-Chun Zhu ; Yao-Guo Xue ; Sheng-Liang Zhang ; Qian-Yu Zhang
Author_Institution :
Inst. of VME & MEMS, Xi´an Jiaotong Univ., China
fDate :
July 30 1995-Aug. 3 1995
Abstract :
In this paper a novel method for fabricating large area metal field emission cathode arrays, in which flat glass is used as substrate and thick photosensitive organic film as mold, has been put forward for the first time. The specific process is probed tentatively under our current conditions. Finally, improvement of the process is discussed.
Keywords :
cathodes; vacuum microelectronics; fabrication; flat glass substrate; large area metal field emission cathode arrays; photosensitive organic film mold; Cathode ray tubes; Delay; Electron tubes; Glass; Micromechanical devices; Optical films; Semiconductor devices; Semiconductor films; Substrates; Temperature distribution;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487017
