DocumentCode
3251420
Title
A novel method for fabricating large area metal field emission cathode arrays
Author
Tian-Ying Li ; Chang-Chun Zhu ; Yao-Guo Xue ; Sheng-Liang Zhang ; Qian-Yu Zhang
Author_Institution
Inst. of VME & MEMS, Xi´an Jiaotong Univ., China
fYear
1995
fDate
July 30 1995-Aug. 3 1995
Firstpage
168
Lastpage
170
Abstract
In this paper a novel method for fabricating large area metal field emission cathode arrays, in which flat glass is used as substrate and thick photosensitive organic film as mold, has been put forward for the first time. The specific process is probed tentatively under our current conditions. Finally, improvement of the process is discussed.
Keywords
cathodes; vacuum microelectronics; fabrication; flat glass substrate; large area metal field emission cathode arrays; photosensitive organic film mold; Cathode ray tubes; Delay; Electron tubes; Glass; Micromechanical devices; Optical films; Semiconductor devices; Semiconductor films; Substrates; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location
Portland, OR, USA
Print_ISBN
0-7803-2143-X
Type
conf
DOI
10.1109/IVMC.1995.487017
Filename
487017
Link To Document