Title :
Ion bombardment sharpening of field emitter arrays
Author :
Auciello, O. ; Yadon, L. ; Temple, D. ; Mancusi, J.E. ; McGuire, G.E. ; Hirsch, E. ; Gray, H.F. ; Tang, C.M.
Author_Institution :
Electron. Technol. Div., MCNC, Research Triangle Park, NC, USA
fDate :
July 30 1995-Aug. 3 1995
Abstract :
First results are presented on controlled ion bombardment sharpening of ungated and gated field emitter arrays (FEAs). The initial results indicate that controlled ion bombardment can produce sharpening of emitter tips in very short periods of time while maintaining the FEAs at, or close to, room temperature.
Keywords :
electron field emission; ion beam applications; vacuum microelectronics; FEA fabrication; emitter tips; field emitter arrays; gated field emitter arrays; ion bombardment sharpening; ungated field emitter arrays; Electrodes; Electron emission; Field emitter arrays; Heating; Ion beams; Oxidation; Performance analysis; Scanning electron microscopy; Surfaces; Temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
DOI :
10.1109/IVMC.1995.487023
