DocumentCode :
3251691
Title :
Field penetration, electron supply and effective work function in semiconductor field-emission cathodes
Author :
Hunt, C.E. ; Kesling, W.D.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
fYear :
1995
fDate :
July 30 1995-Aug. 3 1995
Firstpage :
221
Abstract :
Summary form only given. It is widely assumed that n-type silicon field-emission cathodes should be heavily doped to maximize the availability of electrons at the emission surface. Field emission from semiconductors, however, is different than from metals in that, among other things, the concept of an independent supply function is likely not valid. Penetration of the external field into semiconductor cathodes, which is dependent on dopant concentration, enables hot electron accumulation and impact ionization near the surface. The application of the Fowler-Nordheim model, as is useful with ideal metal cathodes, is insufficient for this more complicated condition. As donor concentration decreases in the cathode, the electron supply is increasingly drawn from the larger volume of the semiconductor away from the tunneling surface. Furthermore, the drift of electrons within the semiconductor creates a condition where the tunneling electrons at the surface need to overcome an "effective" work function, which is less than the equilibrium value. The result is a higher current density from an applied external field than would be obtained from a metal or degenerately-doped semiconductor with the same equilibrium work function. We present here modeling results which suggest that an "optimum" doping level exists somewhere between light and degenerate concentrations.
Keywords :
cathodes; current density; degenerate semiconductors; doping profiles; electron field emission; hot carriers; impact ionisation; vacuum microelectronics; work function; applied external field; current density; degenerately-doped semiconductor; dopant concentration; effective work function; electron supply; emission surface; equilibrium work function; field penetration; hot electron accumulation; impact ionization; semiconductor field-emission cathodes; tunneling surface; Cathodes; Current density; Electron emission; Impact ionization; Semiconductor device doping; Semiconductor process modeling; Temperature sensors; Tunneling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location :
Portland, OR, USA
Print_ISBN :
0-7803-2143-X
Type :
conf
DOI :
10.1109/IVMC.1995.487029
Filename :
487029
Link To Document :
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