Title :
Frequency analysis of integrated micromachined inductive microphone
Author :
Jallouli, M.E. ; Tounsi, F. ; Mezghani, B. ; Smaoui, S. ; Masmoudi, M.
Author_Institution :
Res. Group on Microtechnol. & Syst. on Chip, Sfax, Tunisia
Abstract :
This paper is focused on frequency analysis of integrated micromachined inductive microphone. It is a very important step in the conception of integrated sensors. The concept of this new structure is based on the variation of mutual inductance between an external fixed inductor and an internal suspended inductor. The internal inductor is fabricated on top of a suspended membrane. Our goal is to increase the resonant frequencies of the suspended structure. We propose a new model of a membrane to the monolithic CMOS integrated inductive microphone. We studied the dynamic response. The choice of the new model is derived and discussed. The frequencies and the associated mode shapes determined by finite element analysis using SOLIDWORKS and COSMOSWORKS with technology AMS 0.8 μm, are described. The purpose is to demonstrate a sensibility of the microphone.
Keywords :
CMOS integrated circuits; dynamic response; electronic engineering computing; finite element analysis; inductance; micromachining; microphones; 0.8 micron; AMS technology; COSMOSWORKS; SOLIDWORKS; dynamic response; external fixed inductor; finite element analysis; frequency analysis; integrated micromachined inductive microphone; integrated sensors; internal suspended inductor; monolithic CMOS integrated inductive microphone; mutual inductance; resonant frequency; Biomembranes; CMOS process; CMOS technology; Fabrication; Frequency; Inductance; Inductors; Microphones; Semiconductor device modeling; Voltage;
Conference_Titel :
Microelectronics, 2004. ICM 2004 Proceedings. The 16th International Conference on
Print_ISBN :
0-7803-8656-6
DOI :
10.1109/ICM.2004.1434245
