Self-aligned AlGaN/GaN MODFET with liquid phase deposited oxide gate for microwave power applications

As promising candidates for future microwave power devices, GaN-based high-electron mobility transistors (HEMTs) have attracted much research interest. An investigation of the operation of AlGaN/GaN n type self-aligned MOSFET with modulation doped GaN channels is presented. Liquid phase deposited (LPD) SiO₂ is used as the insulating material. An analytical model based on modified charge control equations is developed. The investigated critical parameters of the proposed device are the maximum drain current (I_Dmax), the threshold voltage (V_th), the peak DC trans-conductance (g_m), break down voltage (V_br) and unity current gain cut-off frequency (f_T). The typical DC characteristics for a gate length of 1 mum with 100 mum gate width are following: I_max = 800 mA/mm, V_break-down = 50 V, g_{m_extrinsic} = 200 mS/mm, V_pinchoff = -10 V. The analysis and simulation results on the transport characteristics of the MOS gate MODFET structure is compared with the previously measured experimental data. The calculated values of f_T (20-130 GHZ) suggest that the operation of the proposed device effectively, has sufficiently high current gain cutoff frequencies over a wide range of drain voltage, which is essential for high-power performance at microwave frequencies. The proposed device offers lower on-state resistance. The results so obtained are in close agreement with the experimental data